Fabricating Precise and Smooth Microgroove Structures on Zr-Based Metallic Glass Using Jet-ECM.

Zr-based metallic glasses (MGs) are promising materials for mold manufacturing due to their unique mechanical and chemical properties. However, the high hardness of metallic glasses and their tendency to crystallize at high temperatures make it challenging to fabricate precise and smooth microscale structures on metallic glasses. This limitation hampers the development of metallic glasses as molds. Jet electrochemical machining (jet-ECM) is a non-contact subtractive manufacturing technology that utilizes a high-speed electrolyte to partially remove material from workpieces, making it highly suitable for processing difficult-to-machine materials. Nevertheless, few studies have explored microgroove structures on Zr-based MGs using sodium nitrate electrolytes by jet-ECM. Therefore, this paper advocates the utilization of the jet-ECM technique to fabricate precise and smooth microgroove structures using a sodium nitrate electrolyte. The electrochemical characteristics were studied in sodium nitrate solution. Then, the effects of the applied voltages and nozzle travel rates on machining performance were investigated. Finally, micro-helical and micro-S structures with high geometric dimensional consistency and low surface roughness were successfully fabricated, with widths and depths measuring 433.7 ± 2.4 µm and 101.4 ± 1.6 µm, respectively. Their surface roughness was determined to be 0.118 ± 0.002 µm. Compared to non-aqueous-based methods for jet-ECM of Zr-based MGs, the depth of the microgrooves was increased from 20 μm to 101 μm. Furthermore, the processed microstructures had no uneven edges in the peripheral areas and no visible flow marks on the bottom.