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Contactless online characterization of large-area conductive thin films by thermography and induction

Kari Remes, Antti Järvenpää, Tapio Fabritius
Optics Letters 2019 May 15, 44 (10): 2574-2577
Testing and characterization techniques intended for traditional electronics production are rarely compatible with modern large-area, thin film electronics manufacturing processes such as roll-to-roll fabrication. Online quality monitoring of conductive thin films is necessary for upscaling and maintaining high-yield production. Thermography has already shown its usefulness in these kinds of applications, but has suffered from the lack of proper non-contact electrical heating. Now a fully contactless quality inspection technique based on thermal imaging and induction heating is implemented and evaluated. This approach is capable of discovering defected areas and estimating conductivity degradation online with full coverage over conductive thin films.


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