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Multilayer graphene nanobelts on SWCNTs films for high current interconnect applications.

Nanotechnology 2019 Februrary 20
In this work we propose multilayer graphene (MLG) nanobelts for high current interconnections with single wall carbon nanotubes (SWCNT) and compare with metal contacts. MLG contacts were directly printed on SWCNT, without additional metal parts, demonstrating possibility to use as interconnections in microelectronics. Different work function metals Al, Ti and Pd were probed for the lowest contact resistance with SWCNT. Ti contacts showed best results among the metals owing to its work function closest to SWCNT and therefore giving lowest Schottky barrier. Even though Ti contacts show lowest contact resistance, nevertheless, current density for MLG contacts was higher, giving best results for high current interconnection application. Moreover MLG contacts show stable and repeatable resistance decrease under high current conditions. Heat treatment of MLG and metal contacts was done in vacuum, in order to further reduce the contact resistance, optimal heat treatment conditions were found at 600 °C.

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