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Copolymer Solid-State Electrolytes for 3D Microbatteries via Initiated Chemical Vapor Deposition.

Reliable integration of thin film solid-state polymer electrolytes (SPEs) with 3D electrodes is one major challenge in microbattery fabrication. We used initiated chemical vapor deposition (iCVD) to produce a series of nanoscale copolymer films comprised of hydroxyethyl methacrylate and ethylene glycol diacrylate. Conformal copolymer coatings were applied to a variety of patterned 3D electrodes and subsequently converted into ionic conductors by lithium salt doping. Broad tunability in ionic conductivity was achieved by optimizing the copolymer crosslinking density and matrix polarity, resulting in a room temperature conductivity of (6.1±2.7)×10-6 S cm-1, the highest value reported for conformal, nanoscale SPEs.

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