Miniature all-glass robust pressure sensor

E Cibula, S Pevec, B Lenardic, E Pinet, D Donlagic
Optics Express 2009 March 30, 17 (7): 5098-106
This paper describes a newly designed all-glass miniature (Ø 125 microm) fiber-optic pressure sensor design that is appropriate for high-volume manufacturing. The fabrication process is based on the chemical etching of specially-designed silica optical fiber, and involves a low number of critical production operations. The presented sensor design can be used with either single-mode or multi-mode lead-in fiber and is compatible with various types of available signal processing techniques. A practical sensor sensitivity exceeding 1000 nm/bar was achieved experimentally, which makes this sensor suitable for low-pressure measurements. The sensor showed high mechanical stability, good quality of optical surfaces, and very high tolerance to pressure overload.


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