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JOURNAL ARTICLE

Frequency-comb-based interferometer for profilometry and tomography

Samuel Choi, Mitsufumi Yamamoto, Daisuke Moteki, Tatsutoshi Shioda, Yosuke Tanaka, Takashi Kurokawa
Optics Letters 2006 July 1, 31 (13): 1976-8
16770404
A novel interferometry technique using a frequency-comb light source is proposed for surface profilometry and tomography of discontinuous objects. Surface profile measurement is performed by sweeping the comb interval frequency without mechanical scanning. Step heights of 0.5 and 1.0 mm are successfully measured by use of the scheme with 9 mum accuracy.

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