Xiaohong Yang, Xinmin Zhang, Pingmei Ming, Yuntao Li, Wei Wang, Yunyan Zhang, Zongbin Li, Lunxu Li, Youping Xiao, Xiaoyi Guo, Zheng Yang
An ultra-narrow precision slit with a width of less than ten micrometers is the key structure of some optical components, but the fabrication of these structures is still very difficult to accomplish. To fabricate these slits, this paper proposed a periodically reducing current over-growth electroforming process. In the periodically reducing current over-growth electroforming, the electric current applied to the electrodeposition process is periodically stepped down rather than being constant. Simulations and experimentation studies were carried out to verify the feasibility of the proposed process, and further optimization of process parameters was implemented experimentally to achieve the desired ultra-narrow precision slits...
December 29, 2023: Micromachines