Saeed S Ba Hashwan, Mohd Haris Md Khir, Illani Mohd Nawi, Mohamad Radzi Ahmad, Mehwish Hanif, Furqan Zahoor, Y Al-Douri, Abdullah Saleh Algamili, Usman Isyaku Bature, Sami Sultan Alabsi, Mohammed O Ba Sabbea, Muhammad Junaid
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies...
February 27, 2023: Nanoscale Research Letters